Question

1. Shipley 1813 (with a viscosity of 21 cps) uses a final spin speed of 4000 RPM for 45 sec with a ramp rate of 10,000 RPM per second. This recipe yields a resist thickness of 1.3 µm. Determine the final spin speed needed to achieve a resist thickness of 1.0 µm.

Answer 1

Sobation Given dote Lwith viscosity of 21 cps ses a fna Spin Speedf4oco RPm --)with a Yome ields o esist thickness a seS Df a, η ) heme hickneSS hesist thickress vis cosrty of vesidt Spin speed 21cPs 5o

2 o.2S 1-3 x10-6- / XIO ト3 x los". 418-9 Thank you