Question

Please solve a,b,c thank you

Question 5 (38 ports) Photolehography Cakculation Consider 0.6 um-thick hyer ofa a) (S points) cakulate the resist contrast postive photoresist has Diso-90m/e and Dy-30mi/en b) (5 pos) cakulute crtical modulstion transfer furction(CMIF) e) (5 points) Assune modulaton transfer finetion(MTF) of areal iage s 04, answer whether the photoresis can be resolved? You ust justify your answer.

Answer 1

Given mat 0.6urr) miek.loudex of a positive. Pholoesist a) γesist contrast- Fomeist contrast we can meaou how wed me sesist con convent the paterns of a blured avrialimage inbe a shosp binany Sten 과 us denoted by Y log, 00 oa 9o 9 Do 3D b) Cn ; Η cal modulation monster Cun dion DDo+ DO -30 90 + 3D : 0.5 c given in tme qesionmat MTE of an aerial image 。、Y- If me TF o an image s euthan CMTF the image wil not be resolved.