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Q3. You find that the diffusion coefficient D of boron is a factor of 10 greater than that of arsenic at 1150 C and that the solid solubility of arsenic is a factor of 10 higher than that of boron: Ds-10 DAS Co(As) 10 Co(B) For the same predeposition time t: (a) Which species, boron or arsenic, has the largest diffusion length? (b) Which has the largest number of atoms/cm2 diffused into Si?

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