Question

4) Determine the equivalent spring constant k and the natural frequency wn of a can- tılever beam element in a microaccelerometer as illustrated in Figure 4 17 The beam is made of silicon wth a Youngs modulus of 190,000 MPa A beam spring and a seismic mass in 50μm し 1000pm m = 10mg Cross section of the beam
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ng to 3g -5 tok 드 toxloon due to point tond at free end to posut load a 3 12 2t 5

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