Question

Plasma question

Question 2. Consider a symmetric, capacitively coupled rf discharge in argon gas having a total applied rf voltage of amplitude 800 V at a frequency f= ω/2π·13.56 MHz. The plate separation is l = 0.1 m, and the gas pressure is 5 mTorr. Use a low pressure discharge model, as in Example 1 of Section 11.2. Principles of Plasma Discharges and Materials Processing - Lieberman a) Determine the electron temperature Te in the discharge. b) Determine the plasma density no and the ion flux. e) Determine the de potential of the plasma with respect to the plates and the ion- bombarding energy (in volts). d) Determine the sheath thickness sm e) Determine the total rf power per unit area required to sustain the discharge ) Determine the rf current amplitude drawn by the discharge.

Answer 1

Avis Swe si asagine -9lyCine - tyso Sine PsoPhaSe - Change so mati ween non-Siste‘ chovnat: ds of homlologuos casovnoSowes s alledCoossgovet occurs metosis I ExPlavnatton Male 22A +Xy Female 2AXx e vain n auto tooPhs dlosa plast CowfBsed of a d- frlled Sa a M aS Stso They x leed Stacks of Membranes Called ayla boids Mown anation

bel > 678). Store E-Plonaltov, : The main ъ0le of ONA inthe alls seSpad to Signals uot Slowste ll cle liqut oSin intensit c) β). Telophase and ke amass โ" telophase move tbuas ofPaste P anapha I