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Bulk micro-machined variable capacitors comb-drive most successful Capacitor gap Stationary fingers Movable fingers Folded-beQue.) How does Bulk micromachined variable capacitor works?

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The Bulk micromachined variable capacitor combines the principle of Parallel plate capacitor and Comb drive actuators . Here via the electrical contacts the voltage is applied to the stationary and moving fingers of the combs , this causes an attractive Electrostatic force between them causing them to draw against each other , That CAUSES THE Area VARIATION BETWEEN THE FINGERS AND SO THE CAPACITOR BECOMES A VARIABLE MODEL DEPENDING UPON HOW MUCH AREA IS BEING VARIED .

AREA CAUSES CAPACITANCE VARIATION BECAUSE ,

C={ \epsilon A / d} is the capacitance and it directly varies with Area of plates . So when comb drive actuates it causes plates area to vary giving us variable capacitance . This is called micromachined since components used here are made by use of microscopic Or very small size level techniques like deposition and etching over a substrate.

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