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Fora n-channel MOSFET with gate oxide thickness of 20 nm, calculate the required phosphorous (P ions/cm^2)...

Fora n-channel MOSFET with gate oxide thickness of 20 nm, calculate the required phosphorous (P ions/cm^2) to be doped to reduced the threshold voltage from 1.5V to 1V. If the P ion implantation takes place for 15 seconds with a beam current of amount 10^-6 Amp, then what scan area will be covered by the implanted beam?

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