Question

2. Precision lenses for lithography in the microelectronics industry are truly expensive. The ones we bought are not imaging as expected. We suspect some surface damage; we want to do SEM examination. Since they are non-conducting materials, we have been told to apply a conductive material (e.g. sputter-coated Au/Pd) to minimize image degradation due to surface charging. But I want to avoid having the coating bury the things I want to view. Please estimate the minimum coating thickness that I wil need to apply. Show how you got these numbers.

Answer 1