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In a 13.56 MHz RF plasma, operating at a pressure of 250 mtorr assume the Te,...

In a 13.56 MHz RF plasma, operating at a pressure of 250 mtorr assume the Te, electron temperature, is Te =20,000 K.
• What is the typical mean free path between electrons – gas collisions?
• Calculate the collision frequency?
• How many collisions will occur between cycles of the applied rf field?

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