Question

3. Refer to the following table for data for the thickness of a deposition. (Do this by hand and by MATLAB). Factor A is the flow rate of arsenic while Factor B is the deposition time. There are four replicates per combination. Replicate Factor Levels IV Low High + 5590 59% 14.037 16.16513.972 13.907 13.88 13.86 14.032 13.914 10min 15min 14.821 14.757 14.843 14.878 14.888 14.92 14.41514.932 Estimate the factor effects a. b. Conduct an analysis of variance. Which factors are important? c. Write down the regression equation that could be used to predict the deposition thickness over the region of arsenic flow rate and deposition time. d. Analyze the residuals. Are there any residuals that should cause concem?

Answer 1

sse 0-86 3358 23 9 A B oadad FPss Modae 2-6 o-40 -2 2933 1-33 | 4.32| o-060ユ o-99o-3336 D-32 A B 0 32 1 2 3-3 0-32 3-83

to 1 +37·62656

D)

95 50 0.58 083 Reduns Predesef

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