21. If a capacitor-based MEMS actuator has capacity of 15 Pf and plate distance is 2...
21. If a capacitor-based MEMS actuator has capacity of 15 Pf and plate distance is 2 microns, what is the across the capacitor? 12 force generation, in nN, when 5 V is applied 2 [2 μη F:CVSb b 1875 nN, a. 17520 nN, d. 1578 nN C. 1526 nN 22. What is the width of opening of SiN layer (a) 55 (b) 59 (c) 72 (d) 85 (e) b67.2355 [ 450μ 50μm (If different from above, write your answer)
21. If a capacitor-based MEMS actuator has capacity of 15 Pf and plate distance is 2 microns, what is the across the capacitor? 12 force generation, in nN, when 5 V is applied 2 [2 μη F:CVSb b 1875 nN, a. 17520 nN, d. 1578 nN C. 1526 nN 22. What is the width of opening of SiN layer (a) 55 (b) 59 (c) 72 (d) 85 (e) b67.2355 [ 450μ 50μm (If different from above, write your answer)