A 248 nm UV step and scan machine costs $10M and can produce 80 300 mm diameter, 90 nm node wafers per hour. A 193 nm UV step and scan machine costs $40M and can process 20 300 mm diameter, 50 nm node wafers per hour. If the machines have a depreciation period of four years, what is the difference in the cost per chip for a chip that occupies 50 square mm at 90 nm resolution if the stepper is used 10 times per process run for the critical layers?
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