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HIGHER COLLE [30 Marks Part 2 2-A TiW layer is deposited on a substrate using a sputtering tool. Table 2 contains layer thick
(b) Estimate the mean and standard deviation of the process. [4 Marks] [2 Marks] (c) Is the layer thickness normally distribu
[4 Marks] (d) If the specifications are at 450 t 30, estimate the process capability. (e) If the specifications are at 450 +
HIGHER COLLE [30 Marks Part 2 2-A TiW layer is deposited on a substrate using a sputtering tool. Table 2 contains layer thickness measurements (in Angstroms) on 20 subgroups of four substrates. Table 2. Subgroup x3 435 450 1 459 449 442 442 440 7 443 444 449 3 457 444 438 453 469 463 4 445 454 457 443 457 456 444 456 6 445 450 449 445 7 452 449 455 446 440 457 444 452 443 463 463 432 10 438 453 452 445 11 457 436 457 456 12 447 441 459 445 13 450 438 465 441 14 438 457 460 453 15 435 451 453 444 16 457 429 450 451 460 17 437 422 431 18 448 467 444 446 19 454 450 450 454 20 and R control charts on this process. Is the process in control? If not, find out-of- [15 Marks] (a) Set up control points and suggest the next step.
(b) Estimate the mean and standard deviation of the process. [4 Marks] [2 Marks] (c) Is the layer thickness normally distributed?
[4 Marks] (d) If the specifications are at 450 t 30, estimate the process capability. (e) If the specifications are at 450 + 30, find the percentage of substrates with nonconforming layer thickness produced by this process. Assume that layer thickness is normally distributed. [5 Marks]
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