Question

The surface micromachined structure illustrated in Fig. 3 is an out-of-plane motion thermal actuator. The actuator is fabricated using the 2-layer MUMPS process. All the poly-Si layers are doped to be n-type. (a) Describe the process flow in the manner as you saw in the lecture. (b) Sketch the process flow and show the cross-sectional view of the device along nn' Cf/Au Metallization Poly 1 Fig.3

Answer 1

T。(c) TCK) a) 귄퍄 a12-32 느looc 313.15 k b 98.6 F 98.6-32 350 32 350 F 400-32 T60 103 3· 15 k