Question

Determine the miNımum thickness of the circular diaphragm of a micro pressure sen- sor made of silicon as illustrated in Figure 4 3 The diaphragm has a diameter of 600 um and its edge iS ngidly fixed to the silicon die The diaphragm is designed to with- stand a pressure of 20 MPa without exceeding the plastic yieldıng strength of 7000 MPa The silicon diaphragm has a Young's modulus E190,000 MPa and a Pois- son's ratio 0 25. Figure 4.3I A circular diaphragm for a pressure sensor d 600 pm Pressune loading p Diaphragm thickness h Diaphi agm Silicon die Constrant base

Answer 1

Cinculan diophnagm oluhon- O micno peu mode oilicon, Xeuron diaphnogn diophang wsthadan day d600 dianeter pstuR 20 MA prenwi yield Atnength f ailicon 00o Mp Daphnogm silcon diophnagm youngs Moduls s silicon die E - 11oo0o Mpa piophnegon thickn(h) cONSIoint bases O. 25 poisson ato The unce actng daphragm _dsephnegm yon ca on phassuse uron W 5.655 N -t. dimphaagm Let the thicenen of Dusing hend f tRe cncuto plote tLe marinun in hadial dinection stes deweloped 3w 4T12 Minimum thicknn of tLe flcte (J5-655) 13.891x6m., 13-891 Mm