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Using sketches and a few short sentences, describe how an ultra-shallow junction (<20nm) is achieved when...

Using sketches and a few short sentences, describe how an ultra-shallow junction (<20nm) is achieved when implanting Boron into silicon. Why do we need an ultra shallow junction in transistor devices.

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Need for shallow trench isolations in transistor devices is to reduce the short channel effect caused because of reduction in channel length of Mosfet's. Short channel effects are decrease of Mosfet threshold voltage ,Drain induced barrier lowering.

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