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What is the Knudsen number in typical (a) sputtering, (b) evaporation, (c) MBE, (d) LPCVD, (e) PECVD systems? 1. 2. What is t

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Knudsen namber Na me tange Cen) Sputeng Kn1o E Vo porath loklen 102 10 to 102) MBE 1 PCv D Kn C0.1-10 e PECVDo The eortical Pumping pred Dittusion Pemp The Relalionshit for alpumpin speed is S Pump speed Lites/ Se man How tate Torr-Li

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