Question

What should the mask opening dimensions be in order to create a 100um deep V-groovıe channel and a 350μm wide and 50μm thick square diaphragm in silicon using KOH. 7? 7? 450 μm 500 μm 350 μm

Answer 1

Given the mask opening dimensions be in order = 100 mu m the deep v - groove channel = 350 mu m & 50 mu m the given diagram is shown bellow y = 350 mu m + (1.41 d) (w_0 = 350 mu m) y = 350 mu m + (1.41)(450 mu m) y = (350 + 634.5) = 984.5 mu m x = 1.41 d x = 1.41 times 100 mu m (w_0 = 0) x = 141 mu m