Question

an IC circuit requires that we design a 50 n-type resistor in a p- type Si wafer. the acceptir doping is 1014/cm3, the donor implant depth is 5 micro met, the lenght of the registor is 20 micromet, and the maximum width allowed is 15 micromet. caculate the required donor density. assume that 1000cm2/Vs 300cm2/Vs

Note c 3x10m/s, h-6.63x10 J-s, mo-9.11x10 kg, q-1.6x 10-19 C, nis-1.5x10/cm3. Eo-8.85x10-12 F/m, Erst 11.8, k-1.38x1023 J/K,

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AIO P-si R-PL -10 | 83.SNõz [.6%(0 12 3 Y-3 2 i6 C벼 10 ni12-3 2ooxloP 16 x(66

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