Question

(a) Silicon wafers can be made p-doped by diffusing boron into the wafer. If Boron is diffused at 1100 °C for 5 hours. Using the diffusion equation below: dx with J is the particle flux (in cm2s1), n is the particle density (in cm-3) and D is the diffusion constant (in cm2.s1). If the concentration of Boron at the surface is 1018 cm-3, calculate the depth below the surface at which the concentration is 1017 cm-3. The Boron diffusion flux is- 3 109 cm2s and D 1.5 10-12 cm2s-1 at the operating temperature.

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dx +18 בו -1 2 רו 9 ノー 8 0 3 丁け

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(a) Silicon wafers can be made p-doped by diffusing boron into the wafer. If Boron is...
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