Consider a modern PMOS capacitor with an Pt gate[1](ΦM= 5.1 eV) and n-type silicon substrate (ND= 1018cm-3).
(a) The desired oxide capacitance is 2.5 µF/cm2. Calculate the SiO2thickness and the HfO2thickness that can enable this capacitance. If the thickness of a monolayer of SiO2is 3.5 Å, how many monolayers is that? What is the advantage of using HfO2?
(b) Calculate the substrate work function and the flatband voltage of the capacitor.
Now qualitatively (but carefully) sketch the band diagrams under the following conditions. Assuming the substrate is grounded, please label the voltage applied on the gate, and its sign, in each case.
(c) thermal equilibrium
(d) electron accumulation
(e) strong inversion.
Consider a modern PMOS capacitor with an Pt gate[1](ΦM= 5.1 eV) and n-type silicon substrate (ND= 1018cm-3). (a) The des...
Problem3: Consider a MOS capacitor maintained at T 300K with the following characteristics: Assume Esi 1.9,x 3.9,8.85 x 10-14 F/cm, and n 1.5 x 1010cm3 . Gate material is n+ poly-silicon . Total negative oxide charge of 5x 1011q C/cnm2 . Substrate is n-type Si, with doping concentration 1x1016 cm3 Oxide thickness 5 nm . The electron affinity for Si is 4.03eV? a) Draw the band diagram at equilibrium. b) From part (a). What is the substrate (bulk) condition at...
Problem 3 (25 points) Consider a MOS capacitor with p polysilicon gate and p-type silicon substrate with NA 1016 cm3. Ef- Ev in the polysilicon gate. Assume the following parameters: I200A, , 1.5x10° cm*,E, -3.9x8.854x104FIcm ox a) (5 points) Calculate the metal-semiconductor work function difference. b) (5 points) Calculate the surface potential at the threshold inversion. c) (5 points) Calculate the depletion width (in μm) at the threshold inversion. d) (5 points) Calculate the flat band voltage. e) (5 points)...
A MOS capacitor is made on n-type silicon with oxide thickness of 50 A, a positive interface charge of 5 x 1010 cm2 and a uniform positive oxide charge of density p- 2 x 106 cm3 throughout the oxide. The substrate is doped with Na-101" cm3 and the gate is polysilicon doped with boron just to the edge of degeneracy (p+ poly, Ef -Ev). a. Calculate the flat band voltage VB and the threshold voltage Vr b. Sketch the charge...
Problem 3: Consider a MOS capacitor maintained at T= 300K with the following characteristics: Assume s 11.9, ox 3.9, 8.85x 10-1 F/cm, and n 1.5 x 1010cm3 Gate material is n poly-silicon Total negative oxide charge of 5x 1011q C/cm . Substrate is n-type Si, with doping concentration 1 x1016 cm-3 Oxide thickness 5 nmm The electron affinity for Si is 4.03eV? e) What is the flat capacitance? f) What is the depletion region width? g) What is the potential...