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Consider a modern PMOS capacitor with an Pt gate[1](ΦM= 5.1 eV) and n-type silicon substrate (ND= 1018cm-3). (a) The des...

Consider a modern PMOS capacitor with an Pt gate[1](ΦM= 5.1 eV) and n-type silicon substrate (ND= 1018cm-3).

(a) The desired oxide capacitance is 2.5 µF/cm2. Calculate the SiO2thickness and the HfO2thickness that can enable this capacitance. If the thickness of a monolayer of SiO2is 3.5 Å, how many monolayers is that? What is the advantage of using HfO2?

(b) Calculate the substrate work function and the flatband voltage of the capacitor.

Now qualitatively (but carefully) sketch the band diagrams under the following conditions. Assuming the substrate is grounded, please label the voltage applied on the gate, and its sign, in each case.

(c) thermal equilibrium

(d) electron accumulation

(e) strong inversion.

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a) period 2TIX20 T. 20 5 5 니 2 0 2 Peviodic 시gnao, 20 5 LCM, ) HCF C20,5) 5)10 (4 Time penod (b) Fourier Sercsom TI 寸Je

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