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Problem 3: Consider a MOS capacitor maintained at T= 300K with the following characteristics: Assume s 11.9, ox 3.9, 8.85x 10

e) What is the flat capacitance? f) What is the depletion region width? g) What is the potential at the substrate surface? h)

Problem 3: Consider a MOS capacitor maintained at T= 300K with the following characteristics: Assume s 11.9, ox 3.9, 8.85x 10-1 F/cm, and n 1.5 x 1010cm3 Gate material is n poly-silicon Total negative oxide charge of 5x 1011q C/cm . Substrate is n-type Si, with doping concentration 1 x1016 cm-3 Oxide thickness 5 nmm The electron affinity for Si is 4.03eV?
e) What is the flat capacitance? f) What is the depletion region width? g) What is the potential at the substrate surface? h) At strong inversion, i. What is the depletion width? ii. What is the voltage drop across the depletion region? iii.What is the structure capacitance? iv. What is the threshold voltage?
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Sol: tox 16 IxIO (6 89 at 1nre çion depletion oidth i 1 Yottage drop acoossth e depletion giorCdcp Cox structue capacitance Cdep+ Cox 6.903 KIO 3.48 K10 UV) Thseshold Voltase сок Co x o,n efOY n4 polyst ) ù= 4..sev -19

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Problem 3: Consider a MOS capacitor maintained at T= 300K with the following characteristics: Assume s 11.9, ox 3.9, 8.85x 10-1 F/cm, and n 1.5 x 1010cm3 Gate material is n poly-silicon Total...
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