Question

Consider an n-channel Silicon MOS system with a substrate resistivity of 10 0-cm and with a polycrystalline gate. Assume that the polysilicon gate is doped with boron atoms to a density of 1x1019 cm and that the silicon dioxide is 50 nm-thick. The channel is not biased except from the gate (Vc= VB = 0). (i) Accurately sketch the band diagram identifying flatband voltage, surface potential at inversion, depletion width at inversion, and charges at inversion. Tabulate these parameters. (ii) Calculate the threshold voltage: a. If the oxide is free of any charge, b. If the oxide if free of charge except for a surface density of (Qf / q) = 1x1012 cm-.

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Answer #1

10A- Cop ox -0.12 V 1/2 -19 7 Ixio2 2.3V Vr -0.12 2.3I 2.43 v

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